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    rameshmanda's Avatar
    rameshmanda Posts: 2, Reputation: 1
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    #1

    Feb 19, 2012, 02:06 AM
    Categarise vacuum pumps based on their working principle?
    Different types of vacuum pump in thin film deposition process
    rameshmanda's Avatar
    rameshmanda Posts: 2, Reputation: 1
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    #2

    Feb 19, 2012, 02:08 AM
    Quote Originally Posted by rameshmanda View Post
    different types of vacuum pump in thin film deposition process
    Rotary pumps, diffusion pumps and ion trapped pumps
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