I can only remember a few scenes from this 1980's or early 90's movies.I believe it was a scifi movie.There was a spaceship crash and the people of the ship were trying to get to this building ,but there were mechanical creatures that would attack from under ground.At the end of the movie there were only two people left and only room for one in the ship to take them off the planet.There may have also been a cyborg little girl or a cyborg teddy bear.Hope someone can tell me what the movie is,thanks.

Could be screamers, try looking on wikipedia, type list of science fiction movies. It will let you search by decades