Hi
What are the universities offering M.S program in VLSI

For the United States: go to the bottom of this page (http://www.petersons.com/GradChannel/code/search.asp?path=gr.fas.grad) (Section B), check the box "Keyword Search", make sure the other two boxes are unchecked, and type "VLSI" in the search box. The search returns 116 hits.

If you're talking about another country or continent, let us know so we can refine the answer.

Vasily